High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator

  1. Dorrio, B.V.
  2. Bugarin, J.
  3. Alen, J.M.
  4. Fernandez, A.
  5. Doval, A.F.
  6. Lopez Vazquez, J.C.
  7. Blanco-Garcia, J.
  8. Fernandez, J.L.
  9. Perez-Amor, M.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Year of publication: 1996

Volume: 2782

Pages: 258-266

Type: Conference paper

DOI: 10.1117/12.250752 GOOGLE SCHOLAR