High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator
- Dorrio, B.V.
- Bugarin, J.
- Alen, J.M.
- Fernandez, A.
- Doval, A.F.
- Lopez Vazquez, J.C.
- Blanco-Garcia, J.
- Fernandez, J.L.
- Perez-Amor, M.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277-786X
Year of publication: 1996
Volume: 2782
Pages: 258-266
Type: Conference paper