Influence of the substrate temperature on silicon-carbon thin films deposited from SiH4 and C2H4 by excimer lamp-CVD

  1. Redondas, X.
  2. González, P.
  3. León, B.
  4. Pérez-Amor, M.
Aldizkaria:
Thin Solid Films

ISSN: 0040-6090

Argitalpen urtea: 1998

Alea: 317

Zenbakia: 1-2

Orrialdeak: 112-115

Mota: Artikulua

DOI: 10.1016/S0040-6090(97)00601-9 GOOGLE SCHOLAR
Datuen iturria: Scopus