Modification of silicon-carbon film properties under high energy ion beam irradiation
- Redondas, X.
- González, P.
- Soto, R.
- León, B.
- Pérez-Amor, M.
- Da Silva, M.F.
- Soares, J.C.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ISSN: 0168-583X
Year of publication: 1998
Volume: 136-138
Pages: 511-515
Type: Article