Modification of silicon-carbon film properties under high energy ion beam irradiation

  1. Redondas, X.
  2. González, P.
  3. Soto, R.
  4. León, B.
  5. Pérez-Amor, M.
  6. Da Silva, M.F.
  7. Soares, J.C.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 1998

Volumen: 136-138

Pages: 511-515

Type: Article

DOI: 10.1016/S0168-583X(97)00692-7 GOOGLE SCHOLAR
La source de données: Scopus