Characterization of Si-rich a-Si 1-X N X :H alloys deposited by laser-CVD
- Banerji, N.
- Serra, J.
- Chiussi, S.
- Lusquiños, F.
- León, B.
- Pérez-Amor, M.
ISSN: 0169-4332
Year of publication: 1999
Volume: 138-139
Issue: 1-4
Pages: 383-387
Type: Article
ISSN: 0169-4332
Year of publication: 1999
Volume: 138-139
Issue: 1-4
Pages: 383-387
Type: Article