Silicon-carbon thin films deposited by excimer lamp-CVD from disilane and ethylene
- Redondas, X.
- González, P.
- León, B.
- Pérez-Amor, M.
ISSN: 0042-207X
Année de publication: 1999
Volumen: 52
Número: 1-2
Pages: 51-54
Type: Article
ISSN: 0042-207X
Année de publication: 1999
Volumen: 52
Número: 1-2
Pages: 51-54
Type: Article