Pulsed laser deposition of a-CNx:H films: The role of target-to-substrate distance and laser fluence
- González, P.
- Soto, R.
- León, B.
- Pérez-Amor, M.
- Szörényi, T.
Journal:
Applied Surface Science
ISSN: 0169-4332
Year of publication: 2000
Volume: 154
Pages: 454-457
Type: Article