Thermal annealing study of variable band-gap a-SiN:H alloy films

  1. Banerji, N.
  2. Faro, E.
  3. Serra, J.
Proceedings:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Year of publication: 2001

Volume: 664

Type: Conference paper

DOI: 10.1557/PROC-664-A8.7 GOOGLE SCHOLAR
Data source: Scopus