Thermal annealing study of variable band-gap a-SiN:H alloy films
- Banerji, N.
- Faro, E.
- Serra, J.
Aktak:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Argitalpen urtea: 2001
Alea: 664
Mota: Biltzar ekarpena