Numerical analysis of Excimer laser assisted processing of multi-layers for the tailored dehydrogenation of amorphous and nano-crystalline silicon films

  1. Fornarini, L.
  2. Conde, J.C.
  3. Chiussi, S.
  4. Gontad, F.
  5. Leon, B.
  6. Martelli, S.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2007

Alea: 254

Zenbakia: 4

Orrialdeak: 898-903

Mota: Artikulua

DOI: 10.1016/J.APSUSC.2007.08.070 GOOGLE SCHOLAR
Datuen iturria: Scopus