Numerical analysis of Excimer laser assisted processing of multi-layers for the tailored dehydrogenation of amorphous and nano-crystalline silicon films

  1. Fornarini, L.
  2. Conde, J.C.
  3. Chiussi, S.
  4. Gontad, F.
  5. Leon, B.
  6. Martelli, S.
Revue:
Applied Surface Science

ISSN: 0169-4332

Année de publication: 2007

Volumen: 254

Número: 4

Pages: 898-903

Type: Article

DOI: 10.1016/J.APSUSC.2007.08.070 GOOGLE SCHOLAR
La source de données: Scopus