Growth and modification of thin a-Si:H/a-Ge:H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing

1. Chiussi, S.
2. Gontad, F.
3. Rodríguez, R.
4. Serra, C.
5. Serra, J.
6. León, B.
7. Sulima, T.
8. Höllt, L.
9. Eisele, I.