FEM for modelling 193 nm excimer laser treatment of SiO2/Si/Si(1-x)Gex heterostructures on SOI substrates
- Conde, J.C.
- Martín, E.
- Chiussi, S.
- Gontad, F.
- González, P.
ISSN: 1862-6351, 1610-1642
Year of publication: 2011
Volume: 8
Issue: 3
Pages: 936-939
Type: Article