FEM for modelling 193 nm excimer laser treatment of SiO2/Si/Si(1-x)Gex heterostructures on SOI substrates

  1. Conde, J.C.
  2. Martín, E.
  3. Chiussi, S.
  4. Gontad, F.
  5. González, P.
Revue:
Physica Status Solidi (C) Current Topics in Solid State Physics

ISSN: 1862-6351,  1610-1642

Année de publication: 2011

Volumen: 8

Número: 3

Pages: 936-939

Type: Article

DOI: 10.1002/PSSC.201000376 GOOGLE SCHOLAR
La source de données: Scopus