Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy

  1. Stefanov, S.
  2. Serra, C.
  3. Benedetti, A.
  4. Conde, J.C.
  5. Werner, J.
  6. Oehme, M.
  7. Schulze, J.
  8. Wirths, S.
  9. Buca, D.
  10. Chiussi, S.
Revista:
Microelectronic Engineering

ISSN: 0167-9317

Any de publicació: 2014

Volum: 125

Pàgines: 18-21

Tipus: Article

DOI: 10.1016/J.MEE.2014.03.017 GOOGLE SCHOLAR