Sealing of hard CrN and DLC coatings with atomic layer deposition

1. Härkönen, E.
2. Kolev, I.
3. Díaz, B.
4. Światowska, J.
5. Maurice, V.
6. Seyeux, A.
7. Marcus, P.
8. Fenker, M.
9. Toth, L.
10. Radnoczi, G.
11. Vehkamäki, M.
12. Ritala, M.