Changes in structure and composition of silicon oxide thin films induced by ultraviolet illumination
- Parada, EG
- Gonzalez, P
- Leon, B
- PerezAmor, M
- DaSilva, MF
- Soares, JC
- Fernandez, A
- GonzalezElipe, AR
- Moss, SC (coord.)
- Ila, D (coord.)
- Cammarata, RC (coord.)
- Chason, EH (coord.)
- Einstein, TL (coord.)
- Williams, ED (coord.)
ISSN: 0272-9172
ISBN: 1-55899-345-2
Ano de publicación: 1997
Volume: 441
Páxinas: 211-216
Congreso: Symposium on Thin Films - Structure and Morphology
Tipo: Achega congreso