Low-temperature silicon oxide films deposited using a CO2 laser

  1. Fernández, D.
  2. González, P.
  3. Pou, J.
  4. León, B.
  5. Pérez-Amor, M.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 1992

Volume: 54

Issue: C

Pages: 112-116

Type: Article

DOI: 10.1016/0169-4332(92)90028-V GOOGLE SCHOLAR
Data source: Scopus