Study of the gas-phase parameters affecting the silicon-oxide film deposition induced by an ArF laser
- González, P.
- Fernández, D.
- Pou, J.
- García, E.
- Serra, J.
- León, B.
- Pérez-Amor, M.
- Szörényi, T.
ISSN: 0721-7250, 1432-0630
Année de publication: 1993
Volumen: 57
Número: 2
Pages: 181-185
Type: Article