Deposition of amorphous silicon nitride thin films by CO2 laser-induced chemical vapour deposition
- Serra, J.
- Szörényi, T.
- Fernández, D.
- González, P.
- García, E.
- Pou, J.
- León, B.
- Pérez-Amor, M.
Journal:
Journal of Non-Crystalline Solids
ISSN: 0022-3093
Year of publication: 1995
Volume: 187
Pages: 353-360
Type: Article