Deposition of amorphous silicon nitride thin films by CO2 laser-induced chemical vapour deposition

  1. Serra, J.
  2. Szörényi, T.
  3. Fernández, D.
  4. González, P.
  5. García, E.
  6. Pou, J.
  7. León, B.
  8. Pérez-Amor, M.
Revue:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Année de publication: 1995

Volumen: 187

Pages: 353-360

Type: Article

DOI: 10.1016/0022-3093(95)00163-8 GOOGLE SCHOLAR