Effect of hydrogen on surface texturing and crystallization of a-Si:H thin film irradiated by excimer laser

  1. Wang, H.
  2. Lusquiños, F.
  3. Lawrence Yao, Y.
Journal:
Applied Physics A: Materials Science and Processing

ISSN: 0947-8396,  1432-0630

Year of publication: 2012

Volume: 107

Issue: 2

Pages: 307-320

Type: Article

DOI: 10.1007/S00339-012-6843-4 GOOGLE SCHOLAR
Data source: Scopus