Effect of hydrogen on surface texturing and crystallization of a-Si:H thin film irradiated by excimer laser

  1. Wang, H.
  2. Lusquiños, F.
  3. Lawrence Yao, Y.
Aldizkaria:
Applied Physics A: Materials Science and Processing

ISSN: 0947-8396 1432-0630

Argitalpen urtea: 2012

Alea: 107

Zenbakia: 2

Orrialdeak: 307-320

Mota: Artikulua

DOI: 10.1007/S00339-012-6843-4 GOOGLE SCHOLAR