Study on excimer laser irradiation for controlled dehydrogenation and crystallization of boron doped hydrogenated amorphous/nanocrystalline silicon multilayers

  1. Gontad, F.
  2. Conde, J.C.
  3. Filonovich, S.
  4. Cerqueira, M.F.
  5. Alpuim, P.
  6. Chiussi, S.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2013

Volume: 536

Pages: 147-151

Type: Article

DOI: 10.1016/J.TSF.2013.04.005 GOOGLE SCHOLAR

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