Study on excimer laser irradiation for controlled dehydrogenation and crystallization of boron doped hydrogenated amorphous/nanocrystalline silicon multilayers
- Gontad, F.
- Conde, J.C.
- Filonovich, S.
- Cerqueira, M.F.
- Alpuim, P.
- Chiussi, S.
Aldizkaria:
Thin Solid Films
ISSN: 0040-6090
Argitalpen urtea: 2013
Alea: 536
Orrialdeak: 147-151
Mota: Artikulua