Structure and composition of Silicon-Germanium-Tin microstructures obtained through Mask Projection assisted Pulsed Laser Induced Epitaxy

  1. Stefanov, S.
  2. Serra, C.
  3. Benedetti, A.
  4. Conde, J.C.
  5. Werner, J.
  6. Oehme, M.
  7. Schulze, J.
  8. Wirths, S.
  9. Buca, D.
  10. Chiussi, S.
Revista:
Microelectronic Engineering

ISSN: 0167-9317

Ano de publicación: 2014

Volume: 125

Páxinas: 18-21

Tipo: Artigo

DOI: 10.1016/J.MEE.2014.03.017 GOOGLE SCHOLAR

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