Role of silylene in the deposition of hydrogenated amorphous silicon

  1. Dietrich, T.R.
  2. Chiussi, S.
  3. Marek, M.
  4. Roth, A.
  5. Comes, F.J.
Journal:
Journal of Physical Chemistry

ISSN: 0022-3654

Year of publication: 1991

Volume: 95

Issue: 23

Pages: 9302-9310

Type: Article

DOI: 10.1021/J100176A050 GOOGLE SCHOLAR
Data source: Scopus