STEFANO
CHIUSSI
PROFESOR/A TITULAR DE UNIVERSIDAD TC
ELENA BEATRIZ
MARTIN ORTEGA
CATEDRATICO/A DE UNIVERSIDAD TC
Publicacións nas que colabora con ELENA BEATRIZ MARTIN ORTEGA (7)
2023
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Pulsed 193 nm Excimer laser processing of 4H–SiC (0001) wafers with radiant exposure dependent in situ reflectivity studies for process optimization
Materials Science in Semiconductor Processing, Vol. 168
2019
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Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Vol. 37, Núm. 6
2012
2011
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FEM for modelling 193 nm excimer laser treatment of SiO2/Si/Si(1-x)Gex heterostructures on SOI substrates
Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 8, Núm. 3, pp. 936-939
2010
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Finite element simulation for ultraviolet excimer laser processing of patterned Si/SiGe/Si(100) heterostructures
Applied Physics Letters, Vol. 97, Núm. 1
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Numerical analysis of temperature profile and thermal-stress during excimer laser induced heteroepitaxial growth of patterned amorphous silicon and germanium bi-layers deposited on Si(100)
Thin Solid Films, Vol. 518, Núm. 9, pp. 2431-2436
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Numerical studies of temperature profile and hydrodynamic phenomena during excimer laser assisted heteroepitaxial growth of patterned silicon and germanium bi-layers
Thin Solid Films, Vol. 518, Núm. 6 SUPPL. 1