Research project
IN-0078-01
EXCIMER LASER IRRADIATION OF A SIGE FILMS DEPOSITED ON SIO2/SI SUBSTRATES GROWN BY ENEA, INCLUDING THEIR CHARACTERISATION BY XPS, TEM, RAMAN TECHNIQUES AND THEIR DE HYDROGENATION
date_range
Duration: from 07 May 2001 to 31 December 2001
(8 months)
It has been granted under a regime of Direct grant.