Improvement of silicon oxide film properties by ultraviolet excimer lamp annealing
- Parada, E.G.
- González, P.
- Serra, J.
- León, B.
- Pérez-Amor, M.
- Flicstein, J.
- Devine, R.A.B.
ISSN: 0169-4332
Year of publication: 1995
Volume: 86
Issue: 1-4
Pages: 294-298
Type: Article