Silica deposition by excimer-laser-induced chemical vapour deposition in perpendicular configuration

  1. Leon, Betty
  2. Klumpp, Armin
  3. Gonzalez, Pio
  4. Parada, Eduardo G.
  5. Fernandez, Dolores
  6. Pou, Juan
  7. Serra, Julia
  8. Sigmund, Hermann
  9. Perez-Amor, Mariano
Journal:
Advanced Materials for Optics and Electronics

ISSN: 1057-9257

Year of publication: 1996

Volume: 6

Issue: 2

Pages: 83-92

Type: Article

DOI: 10.1002/(SICI)1099-0712(199603)6:2<83::AID-AMO225>3.0.CO;2-P GOOGLE SCHOLAR
Data source: Scopus