Modification of silicon nitride films to oxynitrides by ArF excimer laser irradiation

  1. Serra, J.
  2. Parada, E.G.
  3. González, P.
  4. Fernández, D.
  5. Chiussi, S.
  6. Pou, J.
  7. León, B.
  8. Pérez-Amor, M.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 1996

Volume: 80

Issue: 1-2

Pages: 211-215

Type: Article

DOI: 10.1016/0257-8972(95)02714-9 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus