Modification of silicon nitride films to oxynitrides by ArF excimer laser irradiation

  1. Serra, J.
  2. Parada, E.G.
  3. González, P.
  4. Fernández, D.
  5. Chiussi, S.
  6. Pou, J.
  7. León, B.
  8. Pérez-Amor, M.
Revue:
Surface and Coatings Technology

ISSN: 0257-8972

Année de publication: 1996

Volumen: 80

Número: 1-2

Pages: 211-215

Type: Article

DOI: 10.1016/0257-8972(95)02714-9 GOOGLE SCHOLAR
La source de données: Scopus