Comparison of pulsed laser deposition CNx films grown from organic and inorganic targets

  1. González, P.
  2. Soto, R.
  3. León, B.
  4. Pérez-Amor, M.
Journal:
Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Year of publication: 2001

Volume: 19

Issue: 2

Pages: 499-502

Type: Article

DOI: 10.1116/1.1344908 GOOGLE SCHOLAR
Data source: Scopus