Comparison of pulsed laser deposition CNx films grown from organic and inorganic targets

  1. González, P.
  2. Soto, R.
  3. León, B.
  4. Pérez-Amor, M.
Aldizkaria:
Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Argitalpen urtea: 2001

Alea: 19

Zenbakia: 2

Orrialdeak: 499-502

Mota: Artikulua

DOI: 10.1116/1.1344908 GOOGLE SCHOLAR
Datuen iturria: Scopus