Laser crystallisation of poly-SiGe for microbolometers

  1. Chiussi, S.
  2. Serra, C.
  3. Serra, J.
  4. González, P.
  5. León, B.
  6. Urban, S.
  7. Andrä, G.
  8. Bergmann, J.
  9. Falk, F.
  10. Fabbri, F.
  11. Fornarini, L.
  12. Martelli, S.
  13. Rinaldi, F.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2002

Volume: 186

Issue: 1-4

Pages: 166-172

Type: Conference paper

DOI: 10.1016/S0169-4332(01)00614-6 GOOGLE SCHOLAR
Data source: Scopus