Crystallisation of 500nm thick A-SiGe:H films through ArF-Excimer Laser radiation
- Chiussi, S.
- Fabbri, F.
- Fornarini, L.
- González, P.
- León, B.
- Martelli, S.
- López, E.
- Serra, C.
- Serra, J.
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277-786X
Argitalpen urtea: 2003
Alea: 5147
Orrialdeak: 204-211
Mota: Biltzar ekarpena