ArF-excimer laser induced chemical vapour deposition of amorphous hydrogenated SiGeC films

  1. López, E.
  2. Chiussi, S.
  3. Serra, C.
  4. Serra, J.
  5. González, P.
  6. León, B.
  7. Pérez-Amor, M.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2003

Volume: 208-209

Issue: 1

Pages: 682-687

Type: Conference paper

DOI: 10.1016/S0169-4332(02)01426-5 GOOGLE SCHOLAR
Data source: Scopus