Laser assisted integrated processing of SiGeC films on silicon

  1. López, E.
  2. Chiussi, S.
  3. Serra, J.
  4. González, P.
  5. Serra, C.
  6. León, B.
  7. Fabbri, F.
  8. Fornarini, L.
  9. Martelli, S.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2004

Volume: 453-454

Pages: 46-51

Type: Conference paper

DOI: 10.1016/J.TSF.2003.11.179 GOOGLE SCHOLAR
Data source: Scopus