FEM numerical analysis of excimer laser induced modification in alternating multi-layers of amorphous and nano-crystalline silicon films

  1. Conde, J.C.
  2. Martín, E.
  3. Stefanov, S.
  4. Alpuim, P.
  5. Chiussi, S.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2012

Volume: 258

Issue: 23

Pages: 9342-9346

Type: Conference paper

DOI: 10.1016/J.APSUSC.2012.01.050 GOOGLE SCHOLAR
Data source: Scopus