FEM numerical analysis of excimer laser induced modification in alternating multi-layers of amorphous and nano-crystalline silicon films
- Conde, J.C.
- Martín, E.
- Stefanov, S.
- Alpuim, P.
- Chiussi, S.
ISSN: 0169-4332
Année de publication: 2012
Volumen: 258
Número: 23
Pages: 9342-9346
Type: Communication dans un congrès