Study on excimer laser irradiation for controlled dehydrogenation and crystallization of boron doped hydrogenated amorphous/nanocrystalline silicon multilayers
- Gontad, F.
- Conde, J.C.
- Filonovich, S.
- Cerqueira, M.F.
- Alpuim, P.
- Chiussi, S.
Revista:
Thin Solid Films
ISSN: 0040-6090
Ano de publicación: 2013
Volume: 536
Páxinas: 147-151
Tipo: Artigo