Geometrical factors affecting the CO2 laser chemical vapour deposition of silicon oxide films in parallel configuration

  1. Fernández, D.
  2. González, P.
  3. Pou, J.
  4. García, E.
  5. León, B.
  6. Pérez-Amor, M.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1992

Volume: 220

Issue: 1-2

Pages: 100-105

Type: Article

DOI: 10.1016/0040-6090(92)90555-P GOOGLE SCHOLAR
Data source: Scopus