Geometrical factors affecting the CO2 laser chemical vapour deposition of silicon oxide films in parallel configuration

  1. Fernández, D.
  2. González, P.
  3. Pou, J.
  4. García, E.
  5. León, B.
  6. Pérez-Amor, M.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 1992

Volumen: 220

Número: 1-2

Pages: 100-105

Type: Article

DOI: 10.1016/0040-6090(92)90555-P GOOGLE SCHOLAR
La source de données: Scopus