ArF excimer laser epitaxy of Si x Ge 1-x alloys studied by XRD and XPS

  1. Larciprete, R.
  2. Willmott, P.
  3. Martelli, S.
  4. Cesile, M.C.
  5. Borsella, E.
  6. Chiussi, S.
  7. González, P.
  8. León, B.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 1996

Volume: 106

Pages: 179-185

Type: Article

DOI: 10.1016/S0169-4332(96)00430-8 GOOGLE SCHOLAR
Data source: Scopus