ArF excimer laser epitaxy of Si x Ge 1-x alloys studied by XRD and XPS

  1. Larciprete, R.
  2. Willmott, P.
  3. Martelli, S.
  4. Cesile, M.C.
  5. Borsella, E.
  6. Chiussi, S.
  7. González, P.
  8. León, B.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 1996

Alea: 106

Orrialdeak: 179-185

Mota: Artikulua

DOI: 10.1016/S0169-4332(96)00430-8 GOOGLE SCHOLAR