ArF excimer laser epitaxy of Si x Ge 1-x alloys studied by XRD and XPS

  1. Larciprete, R.
  2. Willmott, P.
  3. Martelli, S.
  4. Cesile, M.C.
  5. Borsella, E.
  6. Chiussi, S.
  7. González, P.
  8. León, B.
Revue:
Applied Surface Science

ISSN: 0169-4332

Année de publication: 1996

Volumen: 106

Pages: 179-185

Type: Article

DOI: 10.1016/S0169-4332(96)00430-8 GOOGLE SCHOLAR
La source de données: Scopus