Comparison of modifications induced by ArF excimer laser irradiation on silicon nitride films deposited by different LCVD methods

  1. Banerji, N.
  2. Serra, J.
  3. Serra, C.
  4. Chiussi, S.
  5. Lusquiños, F.
  6. Redondas, X.
  7. León, B.
  8. Pérez-Amor, M.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 1998

Volume: 100-101

Issue: 1-3

Pages: 393-397

Type: Article

DOI: 10.1016/S0257-8972(97)00655-5 GOOGLE SCHOLAR
Data source: Scopus