Comparison of modifications induced by ArF excimer laser irradiation on silicon nitride films deposited by different LCVD methods

  1. Banerji, N.
  2. Serra, J.
  3. Serra, C.
  4. Chiussi, S.
  5. Lusquiños, F.
  6. Redondas, X.
  7. León, B.
  8. Pérez-Amor, M.
Revue:
Surface and Coatings Technology

ISSN: 0257-8972

Année de publication: 1998

Volumen: 100-101

Número: 1-3

Pages: 393-397

Type: Article

DOI: 10.1016/S0257-8972(97)00655-5 GOOGLE SCHOLAR
La source de données: Scopus