Comparison of modifications induced by ArF excimer laser irradiation on silicon nitride films deposited by different LCVD methods

  1. Banerji, N.
  2. Serra, J.
  3. Serra, C.
  4. Chiussi, S.
  5. Lusquiños, F.
  6. Redondas, X.
  7. León, B.
  8. Pérez-Amor, M.
Aldizkaria:
Surface and Coatings Technology

ISSN: 0257-8972

Argitalpen urtea: 1998

Alea: 100-101

Zenbakia: 1-3

Orrialdeak: 393-397

Mota: Artikulua

DOI: 10.1016/S0257-8972(97)00655-5 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus